JPS6424863U - - Google Patents
Info
- Publication number
- JPS6424863U JPS6424863U JP11912387U JP11912387U JPS6424863U JP S6424863 U JPS6424863 U JP S6424863U JP 11912387 U JP11912387 U JP 11912387U JP 11912387 U JP11912387 U JP 11912387U JP S6424863 U JPS6424863 U JP S6424863U
- Authority
- JP
- Japan
- Prior art keywords
- region
- pressure
- semiconductor substrate
- oxide film
- pressure transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11912387U JPS6424863U (en]) | 1987-08-03 | 1987-08-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11912387U JPS6424863U (en]) | 1987-08-03 | 1987-08-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6424863U true JPS6424863U (en]) | 1989-02-10 |
Family
ID=31364080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11912387U Pending JPS6424863U (en]) | 1987-08-03 | 1987-08-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6424863U (en]) |
-
1987
- 1987-08-03 JP JP11912387U patent/JPS6424863U/ja active Pending